The extent to which products meet specifications needs to be systematically monitored in a production process. Product quality will typically be defined by two quantities: deviations from stated ...

Control charts have two general uses in an improvement project. Undeniably, the most common application is as a tool to ...

Control charts have been widely used for monitoring production processes and identifying assignable causes of variability. Many papers investigate the application of control charts in different ...

Overlay control based on DI metrology of optical targets has been the primary basis for run-to-run process control for many years. In previous work we described a scenario where optical overlay ...

Aim: To demonstrate the potential of in-line nanoparticle size measurements using the NanoFlowSizer (NFS) as a PAT method. To achieve real-time process control by establishing automated regulation of ...