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  1. Sputter deposition - Wikipedia

    Sputter deposition is a physical vapor deposition (PVD) method of thin film deposition by the phenomenon of sputtering. This involves ejecting material from a "target" that is a source onto a …

  2. Sputter Deposition - an overview | ScienceDirect Topics

    Sputter deposition process is a physical vapor deposition technique (PVD) that uses sputtering to produce thin layers. It is a procedure where material is discharged over the substrate by energetic …

  3. Sputtering Deposition: A Complete Guide To Method - VacCoat

    Sputtering deposition is a method of creating thin films of a few nanometers to a few micrometers on the desired substrate. In this process, the atoms separated from the surface of the target material are …

  4. Sputter deposition - LNF Wiki

    Nov 16, 2023 · Sputter deposition is a physical vapor deposition method of thin film deposition in which a high-purity source material (called a cathode or target) is subjected to a gas plasma (typically argon).

  5. An Overview of Sputtering Deposition | Technological knowledge

    What is Sputtering Deposition? Sputtering deposition, or sputter coating, is one of the physical vapor deposition technology, whereby particles are ejected from a solid target material due to the …

  6. AVS - Sputter Deposition

    Films are deposited by sputtering for their useful properties in microelectronics, surface protection, optics, etc., by a variety of sputtering techniques. The film properties depend on the parameters of …

  7. Understanding Sputter Deposition and Other PVD Methods

    Dec 10, 2024 · Sputter deposition is a widely used physical vapor deposition process that creates thin films by ejecting atoms from a solid target material. This method relies on plasma, which consists of …

  8. (PDF) Sputtering Deposition - ResearchGate

    Oct 31, 2022 · Sputtering deposition is a common physical vapor deposition technology that has benefits over the molecular beam epitaxy and pulsed laser deposition in order to produce films of large area …

  9. What is Sputtering? Understanding the Process and Applications

    Aug 8, 2025 · Sputtering, also known as sputter deposition, is a coating technique of PVD processes based on high vacuum conditions. Moreover, it is used as a cleaning method to produce high-purity …

  10. Sputtering thin films: Materials, applications, challenges and future ...

    Aug 1, 2024 · Sputtering is a physical process of depositing thin films. It falls under the category of thin film technology known as physical vapor deposition (PVD) [9]. Sputtering is a phenomenon in which …